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发明名称
FLOWWRATE CONTROLLER
摘要
申请公布号
JPS5510674(A)
申请公布日期
1980.01.25
申请号
JP19780083667
申请日期
1978.07.10
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YANAI NOBORU;KOBAYASHI MITSUO;TOMITA TAKEHIKO;KAWASAKI HIROIKU
分类号
C02F1/00;B01D21/24;B01D21/30;G05D7/00;G05D7/06
主分类号
C02F1/00
代理机构
代理人
主权项
地址
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