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发明名称
Method for depositing a hard, fine-grained, non-columnar alloy of tungsten and carbon on a substrate
摘要
申请公布号
US4874642(A)
申请公布日期
1989.10.17
申请号
US19870092809
申请日期
1987.09.03
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
GARG, DIWAKER;KLUCHER, BETH A.;DYER, PAUL N.;KIDD, RICHARD W.;CECCARELLI, CHRISTOPHER
分类号
C01B31/34;C23C16/08;C23C16/30;C23C16/32
主分类号
C01B31/34
代理机构
代理人
主权项
地址
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