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发明名称
PRODUCING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS559449(A)
申请公布日期
1980.01.23
申请号
JP19780082409
申请日期
1978.07.05
申请人
NIPPON ELECTRIC CO
发明人
SAKATA MASANORI
分类号
H01L21/316;H01L21/324
主分类号
H01L21/316
代理机构
代理人
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