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发明名称
Projektionsmaske
摘要
申请公布号
DE2845147(B1)
申请公布日期
1980.01.17
申请号
DE19782845147
申请日期
1978.10.17
申请人
CENSOR PATENT- UND VERSUCHS-ANSTALT, VADUZ
发明人
MAYER, HERBERT, DIPL.-PHYS.;LOEBACH, ERNST, DR.
分类号
G03F1/48;H01L21/027;(IPC1-7):G03FX/
主分类号
G03F1/48
代理机构
代理人
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