| 摘要 |
<p>PURPOSE:To form an emitting part and a gate electrode in very good reproducibility and uniformly by independently forming wedge-shaped each one surface of an electron emitting part, in forming the electron emitting part. CONSTITUTION:A metal film 7 serving as a gate electrode is molded on the first/second insulating films 4, 6. Next on the first/second insulating films 4, 6, a metal, wire 7 serving as a gate electrode is filmed. In molding this metal film 7, for instance, Al, gold, tungsten, molybdenum, etc., are filmed by a vacuum evaporation method. Here is formed a dogleg-shaped upper part of the first insulating film into a mask, to self align the metal film divided into a protruding part and the other part in the point end of an electron gun electron emitting part formed of the first and second faces (111), and an oxidized film of the electron gun electron emitting part is placed in an exposed condition to mold a film. Next by removing SiO3 which is an insulating film in the point end of the electron gun emitting part 10, the emitting part point end is exposed to form the gate electrode 11.</p> |
