GLOW DISCHARGE APPARATUS FOR EMISSION SPECTROCHEMICAL ANALYSIS

摘要

PURPOSE:To make possible analysis of insulation material through the utilization of glow discharge and widen the range of application by providing an auxiliary electrode having through-holes to the cathode part between the anode part and the sample to be measured. CONSTITUTION:The inner sample contact part 3a of a cathode flange 3 is machined to disc form and an auxiliary electrode 12 of mesh form by metal wires of high purity, e.g., Ni wires or the like is fixed to the machined part of the flange 3. The sample 4 to be analyzed is put parallel to this auxiliary electrode 12 and is fixed to the cathode flange 3 to maintain a vacuum system. When a DC voltage is subsequently applied between the anode cylinder part 7 and auxiliary electrode 12, glow discharge initiates and a part of the sample 4 face being a cathode part and simultaneously an insulator is also spattered. Removing the components of the auxiliary electrode 12 from the spectra obtainted in this way makes possible the composition analysis of the sample 4 to be analyzed. Particularly if the auxiliary electrode 12 is made in mesh form, stable discharge is obtainable over the entire sample 4 face.