| 发明名称 |
Stripping liquid compositions |
| 摘要 |
A photoresist stripping liquid composition comprising an alkanol amine compound, a sulfone compound or sulfoxide compound, and a hydroxy compound. The composition is excellent in its photoresist stripping performance, safety and working efficiency, and does not cause corrosion on a substrate possessing a metal film.
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| 申请公布号 |
US5480585(A) |
申请公布日期 |
1996.01.02 |
| 申请号 |
US19950430604 |
申请日期 |
1995.04.28 |
| 申请人 |
NAGASE ELECTRONIC CHEMICALS, LTD. |
发明人 |
SHIOTSU, SHINICHIRO;HORIUCHI, YOSHIAKI |
| 分类号 |
C11D7/26;C11D7/32;C11D7/34;C11D7/50;G03F7/42;H01L21/311;(IPC1-7):C11D1/40;C11D1/70;C11D1/755;G03C5/30 |
主分类号 |
C11D7/26 |
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