发明名称 PROCESS FOR FORMING A LOW RESISTANCE INTERCONNECT IN MOS NCHANNEL SILICON GATE INTEGRATED CIRCUITS
摘要 A low resistance crossunder (interconnect) for n-channel, silicon gate integrated circuits, particularly useful where shallow source and drain regions are employed. The crossunder is formed in the substrate from a doped polycrystalline silicon layer which contacts the substrate at the site of the crossunder. The crossunder is formed without substantial alterations to the standard process flow.
申请公布号 GB1558415(A) 申请公布日期 1980.01.03
申请号 GB19770001077 申请日期 1977.01.12
申请人 INTEL CORP 发明人
分类号 H01L29/78;H01L21/225;H01L21/285;H01L21/3205;H01L21/336;H01L23/52;H01L23/535;H01L29/417;(IPC1-7):01L21/82 主分类号 H01L29/78
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