| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator in which fluctuation of displacement differences Δf of respective vibration parts in a natural resonant frequency fafb thereof are less even after a piezoelectric vibration element is joined to a base, and which has a high output sensity. SOLUTION: A piezoelectric vibrator is composed of a piezoelectric vibration element 10 in which a drive side vibration part 1A composed of drive vibration branches 3, 4 formed therein with drive electrodes, an input branch formed therein with a drive input electrode and reinforcing branches, and a detection side vibration part 1B composed of detecting vibration branches 6, 7 formed therein with detection electrodes, an output branch formed therein with a detecting output electrode and reinforcing branches are integrally incorporated respectively with a pair of opposite end faces of a center coupling base part 2, and a base 20 on which the piezoelectric vibration element 10 is mounted. In this arrangement, after the piezoelectric vibration element 10 is mounted on the base 20, the reinforcing branches 91 to 94 of the drive side vibration part 1A and/or the detection side vibration part 1B of the piezoelectric vibration element 10 are polished so as to finely adjust the frequency. |
