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发明名称
摘要
申请公布号
JPS54184066(U)
申请公布日期
1979.12.27
申请号
JP19780083845U
申请日期
1978.06.19
申请人
发明人
分类号
H01L47/00;C30B19/06;H01L21/208;H01L47/02;(IPC1-7):H01L21/208;B01J17/06
主分类号
H01L47/00
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代理人
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