| 摘要 |
A drive system for positioning a table used to support semi-conductor slices. The drive system is capable of laterally moving the table and is also capable of rotating the table. To achieve this, the drive system utilises two lever systems, one lever system, (5, 6 and 7) serving to rotate the table and the other lever system, (1-4) which is basically a pantograph serves to laterally move the table. Both lever systems are pivotally connected to one another. <IMAGE> |
