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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPS54163681(A)
申请公布日期
1979.12.26
申请号
JP19780072968
申请日期
1978.06.15
申请人
KYUSHU NIPPON ELECTRIC
发明人
IMAMURA TOORU
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
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