发明名称 ALCOHOL VAPOR DRYER SYSTEM
摘要 The alcohol vapor dryer system is provided which is completely free from the risk of fire and maximizes the drying performance. The alcohol vapor dryer system comprises a vapor generating chamber, a heating means for heating liquid alcohol in the vapor generating chamber, a process chamber for drying workpieces, a gas supplying means for generating nitrogen and for supplying the nitrogen to transfer the heated nitrogen gas and/or the alcohol vapors to the fluid ducts connected to the process chamber, a drain vessel for collecting and cooling the mixture from the process chamber and a suction means for accelerating the drying of the liquid formed by the condensing of the alcohol vapors remaining on the workpiece and the jig.
申请公布号 WO9833207(A1) 申请公布日期 1998.07.30
申请号 WO1998KR00012 申请日期 1998.01.23
申请人 KIM, JAE, HYOUNG 发明人 KIM, JAE, HYOUNG
分类号 H01L21/00 主分类号 H01L21/00
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