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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54159884(A)
申请公布日期
1979.12.18
申请号
JP19780069155
申请日期
1978.06.07
申请人
NIPPON ELECTRIC CO
发明人
MATSUDA KOUHEI
分类号
H01L29/74
主分类号
H01L29/74
代理机构
代理人
主权项
地址
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