DETECTION METHOD FOR SEMICONDUCTOR SUBSTRATE POSITION AND BREAK,申请号JP19780069366-传众专利搜索

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发明名称	DETECTION METHOD FOR SEMICONDUCTOR SUBSTRATE POSITION AND BREAK
摘要
申请公布号	JPS54159877(A)	申请公布日期	1979.12.18
申请号	JP19780069366	申请日期	1978.06.07
申请人	MATSUSHITA ELECTRONICS CORP	发明人	FUJII YUUZOU;KOGA MASAAKI;KOJIMA MAKOTO
分类号	H01L21/68;H01L21/66	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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