| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic heater in which temperature is uniformly distributed on a heating surface by minimizing a thickness dispersion of a resistance heating element embedded in a ceramic body. SOLUTION: A green sheet for a resistance heating element is produced by a tape forming method by adding solvent and binder to metal with a high fusing point, its alloy or conductive ceramics powder and kneading them, and after forming a green sheet laminated body by inserting a piece blanked out to a designated heating pattern by a die between the green sheets to compose a ceramic body, it is degreased, and is then baked. A heating pattern in which a difference between the maximum value and the minimum value of a thickness (t) of each heating element 4 in a cutting plane cut by at least two line segments passing through an almost center point in a heating pattern region composed by a band shaped resistance heater element 4 is not more than 10% of an average thickness value of the resistance heating element 4 in all cutting planes, is embedded in a flat ceramic body 2 in order to compose a ceramic heater 1.</p> |
