| 摘要 |
PURPOSE:To effect degassing and cleaning of material to be treated, by operating a vacuum heating furnace equipped with an exhausting unit, a heater, a thermometer, a vacuum gauge, a vacuum control unit, a press. and temp. control unit, and power control unit. CONSTITUTION:The material 1 to be treated is degassed and cleaned in a vacuum heating furnace 2, which is equipped with a thermometer 8, a press. and temp. control units connected to a power control unit 16 and to a vacuum control unit 6. The vacuum control unit 6 is equipped with a press. contact which produces signals at prescribed upper and lower limits of vacuum range. The furnace 2 is heated by a heater 3 and evacuated in order to remove the gas or org. substances having been adsorbed by the material 1. When signals from the press. contact indicating the upper limit are received, the furnace temp. is kept as it is. When signals indicating the lower limit are received, the furnace temp. is raised, and the power for the heater is turned off after a prescribed time. |
