| 摘要 |
PROBLEM TO BE SOLVED: To provide an accelerometer which can store a state that an acceleration such as a shock or the like is applied. SOLUTION: An accelerometer 100 is provided with an anchor part 11 which is fixed onto a substrate, a plumb-hob moving electrode 12 which is supported on the anchor part 11 via beam parts 13 and which comprises a circumferential side face 12a and fixed electrodes 14, 15 which comprise a circumferential side face 16 faced with the circumferential side face 12a of the plumb-hob moving electrode 12 by keeping a prescribed interval. The fixed electrodes 14, 15 are constituted in such a way that the fixed electrodes 14, for detection, which comprise protrusions 14a are provided and that the fixed electrodes 15, for electrostatic attraction, which are insulated and separated from the fixed electrodes 14 for detection are provided. When the plumb-hob moving electrode 12 comes into contact with the protrusions 14a due to an acceleration, the acceleration is detected. In addition, even when the acceleration disappears from this state, their contact state is maintained by electrostatic attraction between the plumb-hob moving electrode 12 and the fixed electrodes 15 for electrostatic attraction. |
