| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-processing device wherein the weight of a rotator is reduced for smaller device. SOLUTION: An induction motor 1, comprising a rotator 3 formed into disc form from a conductive material and a stator 5 comprising a plurality of induction coils 9, wherein a magnetic field generated under polyphase current crosses the rotator 3 provided concentrically with the rotator 3 while being so provided as to rotate in the circumferential direction, a holding mechanism 7 provided at the rotator 3 which holds a substrate, are provided. Since the rotator 3 is configured of just a conductive material instead of simply a ferromagnetic body, its weight is lighter, and the substrate-processing device is made smaller using the induction motor.
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