| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and equipment of an EL (electroluminescence) element simple to constitute and easy to manufacture, and capable of forming a fine luminescent pattern. SOLUTION: Transparent electrodes 14 are formed with a transparent electrode material at specified intervals in a stripe shape on the surface of a transparent substrate 12, and a luminescent layer made of an EL material is stacked on the transparent electrodes 14 by vacuum thin film forming technology. When a luminescent layer is formed, first single fibers 26a are arranged on the substrate 12 at specified pitches in a stretched state, second single fibers 26b thinner than the first single fiber 26a are arranged along the first single fibers 26a so that a picture plane is duplicated with the first single fiber 26a with respect to the substrate 12 surface, a mask frame opened on the substrate 12 surface, to which the first and second single fibers 26a, 26b are fixed in a stretched state is installed, and a thin film layer is formed with a deposited mask 24 by the first and second single fibers 26a, 26b by vacuum thin film forming technology.
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