发明名称 |
Resolving power evaluation method and specimen for electron microscope |
摘要 |
An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.
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申请公布号 |
US6166380(A) |
申请公布日期 |
2000.12.26 |
申请号 |
US19980070839 |
申请日期 |
1998.05.01 |
申请人 |
HITACHI, LTD. |
发明人 |
KITAGAWA, TAIJI;SATO, MITSUGU;SHIMOMA, GOROKU;TAKAHASHI, TADANORI;YOSHIDA, NAOTO;YUKII, MASAYUKI;NINOMIYA, TAKANORI;HORIUCHI, TATSUO;KAWAME, KEISUKE |
分类号 |
G01N1/00;G01N1/28;H01J37/22;H01J37/28;(IPC1-7):G01N1/28;H01J37/26 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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