发明名称 Method for manufacturing an image pickup tube target
摘要 A method for manufacturing an image pickup tube target is disclosed, in which, in evaporating a porous Sb2S3 film in a low pressure insert gas, the amount of pre-evaporation of Sb2S3 is decreased as the number of times of repetitive use of an evaporation boat increases in which Sb2S3 is placed for evaporation, whereby an Sb2S3 film having a given porosity is formed.
申请公布号 US4178196(A) 申请公布日期 1979.12.11
申请号 US19780908286 申请日期 1978.05.22
申请人 HITACHI LTD 发明人 NONAKA, YASUHIKO
分类号 H01J9/233;H01L21/06;H01L27/14;H01L31/08;H01L31/18;(IPC1-7):H01L27/14 主分类号 H01J9/233
代理机构 代理人
主权项
地址