Apparatus for generation and control of dopant and reactive gases

摘要

A system for supplying arsine having automatic arsine monitoring and controls to a semiconductor reactor is described wherein arsine is electrochemically generated from an electrolyte solution such as an inorganic acid and an arsenite salt. The electrolytic cell vessel also comprises the cathode structure. A circular concentric barrier is provided to isolate the oxygen produced at the cathode in an annular region from the arsine generated at the anode located centrally within the cell.