发明名称 SILENT DISCHARGE TYPE GAS LASER DEVICE
摘要 PURPOSE:To realize the silent discharge with a high density while keeping a low application frequency by coating either one of the high- and low-voltage side electrodes with the dielectric at the entire circumference and setting the electrode's equivalent diameter more than several times as large as the length of the discharge gap. CONSTITUTION:High-voltage side electrode 21 opposing to earth metal electrode 1 is formed into a cylindrical shape and coated with dielectric 31 over the entire outer circumference surface. Thus the application voltage can be increased. At the same time, the discharge is given to the entire circumference of dielectric 31, and thus the equivalent electrostatic capacity increases about three times as much as the conventional capacity. If the outer diameter of dielectric 31 is set under several times as large as the length of the discharge gap, the discharge expanded over the edge surface. Thus, the power consumed at the edge surface is smaller than the power entering discharge gap 4 with no particular increment of the power loss. Furthermore, the power can be supplied through water-cooling mouth 22 of high- voltage side electrode 21, and as a result the problem such as the terminal insulation and the like can be improved to increase the application voltage.
申请公布号 JPS54154988(A) 申请公布日期 1979.12.06
申请号 JP19780063987 申请日期 1978.05.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAGI SHIGENORI;TABATA NORIKAZU;OGAWA SHIYUUJI
分类号 H01S3/036;H01S3/038 主分类号 H01S3/036
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