发明名称 Method of treating a monocrystalline body utilizing a measuring member consisting of a monocrystalline layer and an adjoining substratum of different index of refraction
摘要 A method in which a monocrystalline body is subjected in a gas atmosphere to a treatment for changing the thickness of the body, in which the thickness of the body is controlled by means of a measuring member which is subjected to the same treatment and which measuring member, on its side which is subjected to the treatment, consists of a monocrystalline layer and an adjoining substratum of a material having a refractive index differing of that the monocrystalline layer material. The measuring member is obtained by providing a substrate, depositing the monocrystalline layer on the substrate, forming the substratum on the monocrystalline layer, and then removing the substrate to form the measuring member.
申请公布号 US4177094(A) 申请公布日期 1979.12.04
申请号 US19780941969 申请日期 1978.09.13
申请人 U S PHILIPS CORP 发明人 KROON, SIMON G
分类号 C30B25/02;C30B25/16;C30B33/00;C30B33/08;G01B11/06;H01L21/02;H01L21/205;H01L21/306;(IPC1-7):H01L21/66;H01L21/20 主分类号 C30B25/02
代理机构 代理人
主权项
地址