发明名称 CRYOPUMP
摘要 PURPOSE:To achieve a large scale improvement of performance with a simple structure by using, for cooling thermal shield, at least one cylinder of a freezed gas refrigerator equipped with more than two cylinders and also by connecting other cylinder to a gaseous body condensing panel. CONSTITUTION:A freezed gas refrigerator 10 helium gas is provided with 2 independent expansion chambers 11 and 12 having relatively high average temoerature, and a gaseous body condensing panel 16 is made to thermally contact an outside 15 of an expansion chamber 14 located at top end of the chamber 11 and having a relatively low average temperature. Although a gaseous body with a relatively high boiling point is condensed in a thermal shield 17, at the same time, radiation from vacuum space is shut off, and a low temperature output of a panel 16 of approximately 20 deg.K is achieved, and therefore, gaseous body particles such as hydrogen, nitrogen and oxygen, etc., are condensed to the panel 16 enabling inside of a vacuum space 20 to become highly vacuum in clean condition.
申请公布号 JPS54153315(A) 申请公布日期 1979.12.03
申请号 JP19780061899 申请日期 1978.05.24
申请人 AISIN SEIKI 发明人 NAKAMURA KAZUAKI;MOMOSE YUTAKA
分类号 F04B37/08;F25B9/00;F25B9/14 主分类号 F04B37/08
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