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发明名称
(B1) ;SETTING UP DEVICE FOR GRINDING AND POLISHING SEMICONDUCTOR CHIPSUPROVODNIKOVYKH PLASTINOK
摘要
申请公布号
PL206423(A1)
申请公布日期
1979.12.03
申请号
PL19780206423
申请日期
1978.04.27
申请人
INST TECH ELEKTRONOWEJ
发明人
WOJCIK IRENEUSZ
分类号
B24B;B24B7/14;B24B41/06;H01L21/461;(IPC1-7):B24B/
主分类号
B24B
代理机构
代理人
主权项
地址
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