| 摘要 |
PURPOSE:To reduce the fusing solution as well as the oxide product by providing the slider containing the solution tank possessing the small holes at the bottom part onto the semiconductor wafer storing fixed boat constituting the liquid-phase epitaxial growing device via the slider holding the small holes. CONSTITUTION:The 1st slider 18 containing pierced holes h1-h4 is put on fixed boat 17 holding cavity 21 to store semiconductor substrate 22, and then 2nd slider 20 holding pierced holes H1-H4 in the same number as those of slider 18 and formed into the solution tanks by opening the bottom part is placed on slider 18 via fixed stage 19. In such constitution, the solution of the prescribed composition is put into holes H1-H4, and the pressure is applied via weights W1-W4 to match previouslyy the pisitions between holes H1-H4 and h1-h4 each. After this, boat 17 and stage 19 are moved to position small hole 23 of stage 19 between hole H1 and h1, and then substrate 22 is wetted by the solution. This action is repeated to give a contact between the solution within last hole H4 and substrate 22. |
