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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS54152463(A)
申请公布日期
1979.11.30
申请号
JP19780061479
申请日期
1978.05.22
申请人
NIPPON ELECTRIC CO
发明人
MIZUGUCHI TAKASHI
分类号
H01L21/301;H01L21/78
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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