发明名称 |
Apparatus for the electrodeposition of aluminum |
摘要 |
Above the electroplating trough, a lock chamber is arranged which can be flooded with protective gas and is subdivided by means of an intermediate door into an outer chamber and a main chamber. The outer chamber has an outer lock door while the main chamber is connected to the electroplating trough by an inner lock opening. In addition, a work piece transfer device is provided which can be moved between the outer chamber and the main chamber and can be operated from the outside.
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申请公布号 |
US4176034(A) |
申请公布日期 |
1979.11.27 |
申请号 |
US19780896378 |
申请日期 |
1978.04.14 |
申请人 |
SIEMENS AG |
发明人 |
DOTZER, RICHARD;GEHRING, JOHANN;STADTER, JOSEF;STOGER, KLAUS |
分类号 |
C25D3/66;C25D17/00;C25D21/08;C25D21/11;(IPC1-7):25D3/44;25D5/34 |
主分类号 |
C25D3/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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