发明名称 Apparatus for the electrodeposition of aluminum
摘要 Above the electroplating trough, a lock chamber is arranged which can be flooded with protective gas and is subdivided by means of an intermediate door into an outer chamber and a main chamber. The outer chamber has an outer lock door while the main chamber is connected to the electroplating trough by an inner lock opening. In addition, a work piece transfer device is provided which can be moved between the outer chamber and the main chamber and can be operated from the outside.
申请公布号 US4176034(A) 申请公布日期 1979.11.27
申请号 US19780896378 申请日期 1978.04.14
申请人 SIEMENS AG 发明人 DOTZER, RICHARD;GEHRING, JOHANN;STADTER, JOSEF;STOGER, KLAUS
分类号 C25D3/66;C25D17/00;C25D21/08;C25D21/11;(IPC1-7):25D3/44;25D5/34 主分类号 C25D3/66
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