APPARATUS FOR REDUCED-PRESSURE GASEOUS PHASE EPITAXIAL GROWTH AND CONTROL METHOD FOR THEREOF,申请号KR20010034285-传众专利搜索

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发明名称	APPARATUS FOR REDUCED-PRESSURE GASEOUS PHASE EPITAXIAL GROWTH AND CONTROL METHOD FOR THEREOF
摘要
申请公布号	KR100753456(B1)	申请公布日期	2007.08.31
申请号	KR20010034285	申请日期	2001.06.18
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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