发明名称 MEASUREMENT OF BURYING DEPTH
摘要 PURPOSE:To calculate a burying depth accurately by a method wherein an image position of a foreign matter being buried is stored with the irradiation of a radiation beam from a spot radiation source and then, an object is inclined while being moved at the right angle to the radiation with the position of the image kept unmovable. CONSTITUTION:An X-ray image observing device 2 is arranged as opposed to an X-ray source 1 and a desired object 4 intended to measure a burying depth (h) of a foreign matter 3 is disposed therebetween. The position of the object 4 is so adjusted that X rays incident on the center of the device 2 at right angles from the ray source 1 passes through the foreign matter 3 to project an image 6 of the foreign matter 3 at a fixed point in the center of a screen. Then, the object 4 is inclined by an angle theta as indicated by a fine line 41 while being moved as indicated by the broken line 42. Under such a condition, an image of a foreign matter 32 appears at the same position as the image of the foreign matter 3. Here, a distance (h) to the foreign matter 3 from the surface 5 is represented by h=1/sintheta.
申请公布号 JPH01312405(A) 申请公布日期 1989.12.18
申请号 JP19880143805 申请日期 1988.06.13
申请人 RIGAKU CORP 发明人 KUBODERA MITSUYOSHI
分类号 G01B15/00;G01N23/04 主分类号 G01B15/00
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