| 摘要 |
PURPOSE:To obtain easily many kinds of voltage waveforms and also to improve reliability under no influence of noises of element's own, by providing a shield layer between a resistive coating layer and conductors led out from voltage application electrodes or voltage detection electrodes. CONSTITUTION:On insulating substrate 4, several voltage detection electrodes 3, conductors 32 and connection terminals 31 are provided, on which resistive coating layer 11 is provided covering insulating coating 5 and then connected electrically to voltage detection electrodes 3 via perforated holes. Next, shield layer 8 is provided covering insulating coating 6 and on layer 8, several voltage application electrodes 2 and connection terminals 21 to conductors 22 are provided with insulating coating 7 between and then connected electrically to resistive coating layer 11 through holes. Further, earth terminal 9 is drawn from shield layer 8. Then, a fixed voltage is applied to voltage application electrodes 2 and the voltage of each voltage detection electrode 3 is extracted by sequential scanning. |
