AN ANTENNA COOLING DEVICE FOR INDUCTIVELY COUPLED PLASMA GENERATOR

摘要

An antenna cooling device for an inductively coupled plasma generator is provided to improve the cooling efficiency of the antenna by arranging the antenna using a heat pipe and to prevent the performance of plasma generator from being deteriorated. An antenna cooling device for an inductively coupled plasma generator uses a single or plural heat pipes(H1-H5) as an antenna(10). A refrigerant is filled inside the heat pipes. A heat radiator(20) is formed at one end of the heat pipe. The heat radiator is arranged at the other end of the heat pipe. A coating layer is formed on the surface of the heat pipe to improve an electrical conductivity of the heat pipe. The antenna is a series-type antenna. Plural heat pipes are series-connected to each other using a conductive connector.