| 摘要 |
PURPOSE:To make it possible to bend a thin film solar battery arbitrarily by using a resin thin film such as polyimide, which abounds in flexibility and heat-proof property, as the substrate in the thin film solar battery. CONSTITUTION:Metal 2 which is brough into ohmic contact with amorphous Si is evaporated in vacuum on polyimide film 1, and amorphous Si 3 is formed by the sputter evaporation method, etc., and a potential barrier is formed. Metal 4 where most of light transmits is formed by evaporation, and comb-shaped electrde 5 is formed on metal 4, and finally, reflection preventing film 6 is formed. |
