| 摘要 |
PURPOSE:To make it possible to execute swiftly and reliably the opening and shutting operation of a carrier by a method wherein, when partitions formed at equal intervals with those between housing racks respectively coincide with each housing rack by moving the opening and shutting member of the aperture of the carrier, a putting out and in of tabular materials is made possible and when the partitions are respectively positioned between the housing racks, the partitions prevent a fall of the tabular materials as stoppers. CONSTITUTION:A wafer carrier 1 is constituted in such a way that a plurality of steps of housing racks 9 are respectively projected on inner walls 7 and 7' of the wafer carrier 1 at prescribed intervals and a plurality of wafers can be placed in parallel to one another on each housing rack 9 of the housing racks opposing to one another. Moreover, an aperture 3 is provided with an opening and shutting member 11 having partitions 13 provided at the same intervals as the intervals between the housing racks 9. Moreover, the carrier is constituted in such a way that when the partitions 13 are located at positions where each partition 13 coincides with each housing rack 9 by moving this member 11, a putting out and in of the wafers is made possible and in contrast with this, when the partitions 13 are each positioned between the housing racks 9, the partitions stop the entrances and exits of the wafers to fulfill the duty of preventing a fall of the wafers as stoppers. Thereby, the wafer carrier is constituted in such a way that it can be opened and shut according to each stage of the movement and the operability of the carrier is improved. |
