发明名称 Method, system and medium for controlling manufacture process having multivariate input parameters
摘要 A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values. The method further includes the steps of receiving a new set of values for the identified inputs, transforming the new set of values for the identified input using the set of coefficients, and calculating a set of predicted output values using the transformed input values.
申请公布号 US7272459(B2) 申请公布日期 2007.09.18
申请号 US20030712273 申请日期 2003.11.14
申请人 APPLIED MATERIALS, INC. 发明人 KOKOTOV YURI;ENTIN EFIM;SEROR JACQUES;FISHER YOSSI;SAREL SHALOMO;SHANMUGASUNDRAM ARULKUMAR P.;SCHWARM ALEXANDER T.;PAIK YOUNG JEEN
分类号 G06F19/00;G05B11/32;G05B13/04 主分类号 G06F19/00
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