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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54149465(A)
申请公布日期
1979.11.22
申请号
JP19780058434
申请日期
1978.05.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
INOUE KAORU;HIRAO TAKASHI;TAKAYANAGI SHIGETOSHI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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