| 摘要 |
PURPOSE:To carry an object into a cylindrical material and move it without requiring space in front of and in back of the cylindrical material in the unit which causes the object such as a semiconductor wafer to pass and move in the cylindrical material. CONSTITUTION:Heater 2 is arranged surrounding heat-proof cylindrical material 1, and is covered with adiabator 3. Support material 4 and moving material 5 of object M are arranged in parallel in cylindrical material, and driving mechanism 7 moves vertically and horizontally object moving material 5 through rod 7A at a fixed cycle for the object supporting face of support material 4. |
