| 摘要 |
<p>PURPOSE:To obtain an output with a little drift by providing a flow speed detecting element on the tube wall of a flow measurement tube where fluid to be measured is made to flow, and detecting the calorific value of said element as an electrical signal. CONSTITUTION:The flow speed detecting element 13 obtained by integrating a semiconductor element 11 with a heat radiating plate 12 is mounted on a sheet 14 formed of a heat insulating material. The flow speed detecting element 13 is fixed so as to cover a circular opening 14 provided on the tube wall of the flow measurement tube 16 lest the fluid should be shut off. Since the upper and lower parts of the flow speed detecting element 13 is thermally insulated in such a structure, heat conduction is limited only to the part of a sheet made of insulating material whose thermal resistance is large. Therefore, the heat conduction from the element 13 to the measurement tube 16 is very small. The unnecessary conduction of heat to the outside can be checked, thereby obtaining the output with a little drift.</p> |
