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发明名称
Transmission Electron Lithography Method
摘要
申请公布号
GB2020849(A)
申请公布日期
1979.11.21
申请号
GB19790015829
申请日期
1979.05.08
申请人
ROCKWELL INTERNATIONAL CORPORATION
发明人
分类号
H01L21/027;G03F7/20;H01J37/317;(IPC1-7):G03B41/16
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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