发明名称 Metering device for a vacuum deposition apparatus
摘要 A device for feeding materials to an evaporator of a vapor deposition apparatus comprises a balance onto which material to be evaporated is fed and an ejector associated with the balance and responsive to a predetermined weight of the substance on the balance to eject the substance from the balance through a trajectory path and into the evaporator.
申请公布号 US4174676(A) 申请公布日期 1979.11.20
申请号 US19770837152 申请日期 1977.09.28
申请人 BALZERS PATENT-UND BETEILIGUNGS AG 发明人 WULFF, GUNTHER
分类号 C23C14/24;(IPC1-7):B05C11/00;C23C13/12 主分类号 C23C14/24
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