发明名称 |
Metering device for a vacuum deposition apparatus |
摘要 |
A device for feeding materials to an evaporator of a vapor deposition apparatus comprises a balance onto which material to be evaporated is fed and an ejector associated with the balance and responsive to a predetermined weight of the substance on the balance to eject the substance from the balance through a trajectory path and into the evaporator.
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申请公布号 |
US4174676(A) |
申请公布日期 |
1979.11.20 |
申请号 |
US19770837152 |
申请日期 |
1977.09.28 |
申请人 |
BALZERS PATENT-UND BETEILIGUNGS AG |
发明人 |
WULFF, GUNTHER |
分类号 |
C23C14/24;(IPC1-7):B05C11/00;C23C13/12 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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