| 摘要 |
PURPOSE:To provide a metallizing apparatus which is capable of detecting correctly the temp. of a substrate to be metallized, by attaching a heat-collecting plate,made of material high in heat conductivity and low in heat capacity, to a thermo-sensitive device for detecting temp. installed near a substrate holder so as to make less the difference of the temp. of the thermo-sensitive device and that of the substrate to be metallized held by a substrate holder. CONSTITUTION:A heat-collecting plate 10 made of copper etc., which is high in heat conductivity and low in heat capacity, is attached removably to a thin rod thermo-sensitive device 5. The plate 10 is set at the center of holders 3-3-3-n which are at points a distance apart from the infrared ray heaters 4-1-4-n, the distance which is equal to that between the infrared heaters and the centers x of rotation of holders 3-1-3-n. Hereby, in heating holders 3-1-3-n and the plate 10 with heat rays from the heaters 4-1-4-n, the plate is heated effectively, therefore the device 5 integrated with the plate 10 is heated to higher temp. near that of the substrates to be matallized, so that the temp. of the substrates to be metallized is detected correctly by means of the device 5. In figure, 2 is an evaporation source. |
