发明名称 Vacuum vapour deposition plant for coating turbine blades - where vapour not deposited on blades condenses on throwaway perforated collector plate or mesh
摘要 <p>The plant includes a vacuum chamber contg. an evapn. crucible for material to be deposited on substrate located in the chamber. The vapour which is not deposited on the substrates flows towards a condensn. surface, which is covered with a stationary, perforated collector on which the vapour is condensed. The collector pref. consists of either a wire mesh, or a perforated metal sheet, and pref. has a shape similar to the shape of the vacuum chamber. A simple and inexpensive method of collecting condensed coating material as an adherent layer on the mesh or perforated plate, which can be periodically removed from the chamber for cleaning or treating as waste.</p>
申请公布号 DE2821131(A1) 申请公布日期 1979.11.15
申请号 DE19782821131 申请日期 1978.05.13
申请人 LEYBOLD-HERAEUS GMBH 发明人 AICHERT,HANS,DR.-ING.;HOFFMANN,OTTO-HORST,DR.-ING.;STARK,FRIEDRICH;STEPHAN,HERBERT,DR.-PHYS.
分类号 C23C14/56;(IPC1-7):C23C13/08;C23C13/02;C23C15/00 主分类号 C23C14/56
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