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发明名称
RASTERELEKTRONENMIKROSKOP
摘要
申请公布号
DE2819165(A1)
申请公布日期
1979.11.15
申请号
DE19782819165
申请日期
1978.05.02
申请人
SIEMENS AG
发明人
FEUERBAUM,HANS-PETER,DIPL.-PHYS.;OTTO,JOHANN,ING.
分类号
H01J37/20;G01R31/302;H01J37/18;H01J37/28;H01L21/66;(IPC1-7):H01J37/28
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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