| 摘要 |
PROBLEM TO BE SOLVED: To provide a device evaluation system for verifying durability of a device used in a high temperature region from the conventional, and to provide a device evaluation method. SOLUTION: The evaluation system 30 includes a heat generation base plate 45, a cooling member (a base plate 5, a Peltier element 9, a heat radiator 11, a refrigerant flow passage 13, a heat exchanger 15, a pump 14, and a refrigerant 17), a heater, a moving member 40, and a control device 29. The heat generation part base plate 45 includes a semiconductor device and holds an object to be measured 1 supplying electric power. The cooling member is detachably contacted on the heat generation part base plate 45 and dissipates heat of the object to be measured 1. The heater heats the object to be measured 1. The moving member 40 is moved so as to attach and detach the heat generation part base plate 45 to and from the base plate 5 of the cooling member. The control device 29 controls the cooling member, the heater and the moving member 40. COPYRIGHT: (C)2009,JPO&INPIT
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