| 摘要 |
PROBLEM TO BE SOLVED: To reduce a processing load of a digital processing device, when processing a detection waveform detected from a plurality of secondary electron detectors, in an array inspection device. SOLUTION: In data processing of the detection waveform, real-time processing is performed relative to processing from A/D conversion to buffer processing and data addition processing, and interruption processing is performed following the A/D conversion relative to the buffer processing and the data addition processing, to thereby reduce a data quantity to be processed in the real-time processing, and thereby the processing load of the digital processing device is reduced. COPYRIGHT: (C)2009,JPO&INPIT
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