发明名称 SWITCHGEAR DEVICE FOR POD
摘要 An opening/closing device for a semiconductor material container is provided to form a long hole on the connection link which connects a pair of latch keys opening and closing the door of the semiconductor material container to each other and move the long hole horizontally so that manufacturing cost is reduced by simplifying configuration of an instrument and driving power is saved. A rotating member(10) is pivotally installed at a housing(100). A binding piece(32) is formed so that a latch key(30) is installed at a rotating member(10) and is connected with an opening and closing member. A connection link(20) is combined with each rotating member. Both ends of a load(40) are combined with a pair of connection links. A driving device(60) horizontally moves the load right and left. In one side of a pair of connection links, the long hole(26) is formed. The load is displaced within the long hole in order to rotate the rotating member(10).
申请公布号 KR20090000976(A) 申请公布日期 2009.01.08
申请号 KR20070064973 申请日期 2007.06.29
申请人 YEST CO., LTD. 发明人 CHO, BUM SANG
分类号 H01L21/67 主分类号 H01L21/67
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