发明名称 MICRODEVICE SUBSTRATE AND METHOD FOR MAKING MICROPATTERN DEVICES
摘要 <p>Articles exhibiting a micropattern carried by a surface of a support, typically microdevices comprising a micropattern of a functional material on or in a substrate of a dissimilar material, are produced by a method employing a microsubstrate comprising a substrate base, a protein layer which comprises at least a compressed monolayer of a denatured nonfibrous protein on the base, and a masking film overlying the protein layer, the material of the masking film being such as to be modified by radiant energy so as to be removable from the protein layer where irradiated. The method is flexible in the sense that it is possible to proceed via either a positive or a negative of the desired micropattern and to build a more extensive, or more complex, micropattern from an initial relatively simple micropattern.</p>
申请公布号 CA1066209(A) 申请公布日期 1979.11.13
申请号 CA19760267887 申请日期 1976.12.14
申请人 DIOS, INC. 发明人 MCALEAR, JAMES H.;WEHRUNG, JOHN M.
分类号 H01L51/05;B05D5/00;B32B9/02;G03C1/93;G03F7/038;G03F7/039;G03F7/11;G06N3/00;H01L21/027;H01L21/312;H01L21/368;H01L51/30;H01L51/40;H05K3/14;(IPC1-7):07G7/02;08J3/28;08J7/10 主分类号 H01L51/05
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