发明名称 Semiconductor pressure transducer
摘要 A semiconductor pressure transducer comprising a disc-shaped pressure-responsive diaphragm; a pair of radial strain gauge units having a piezoresistance effect, formed by injecting an impurity in the radial direction in the surface of the diaphragm; and a pair of tangential strain gauge units having a piezoresistance effect, formed by injecting an impurity in the tangential direction in the surface of the diaphragm, wherein the distance from the pair of the radial strain gauge units to the center of the circular diaphragm is greater than the distance from the pair of the tangential strain gauge units to the center of the circular diaphragm.
申请公布号 US4173900(A) 申请公布日期 1979.11.13
申请号 US19780883589 申请日期 1978.03.06
申请人 HITACHI LTD 发明人 AI, MITSUO;KATOHGI, KATSUYA;MATSUDA, YASUMASA;MATSUOKA, YOSHITAKA;NISHIHARA, MOTOHISA;SHIMADA, SATOSHI;SHIMAZOE, MICHITAKA;TAKAHASHI, YUKIO;TANABE, MASANORI;YAMADA, KAZUJI
分类号 G01L9/00;H01L29/84;(IPC1-7):G01L9/06 主分类号 G01L9/00
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